INTERNATIONAL PATENT: APPLIED MATERIALS, INC. FILES APPLICATION FOR "DRY DEPOSITION OF EXTREME ULTRAVIOLET (EUV) UNDERLAYER FOR LITHOGRAPHY AND PATTERNING"

GENEVA, Aug. 19 -- APPLIED MATERIALS, INC. (3050 Bowers AvenueSanta Clara, CA 95054) filed a patent application (PCT/US2025/011112) for "DRY DEPOSITION OF EXTREME ULTRAVIOLET (EUV) UNDERLAYER FOR LITHOGRAPHY AND PATTERNING" on Jan 10, 2025. With publication no. WO/2025/170706, the details related to the patent application was published on Aug 14, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): DAI, Huixiong (974 E. Arques AvenueSunnyvale, CA 94085), PHAN, Khoi (974 E. Arques AvenueSunnyvale, CA 94085), XIE, Bo (1140 E. Arques AvenueSunnyvale, CA 94085), LU, Rui (1256 Socorro AvenueSunnyvale,...