GENEVA, June 12 -- APPLIED MATERIALS, INC. (3050 Bowers AvenueSanta Clara, CA 95054) filed a patent application (PCT/US2024/055671) for "DEVELOPMENT FOR CHEMICALLY AMPLIFIED RESISTS" on Nov 13, 2024. With publication no. WO/2025/117185, the details related to the patent application was published on Jun 05, 2025.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): KAZEM, Nasrin (3050 Bowers AvenueSanta Clara, CA 95054), BOZANO, Luisa (27621 Via Cerro GordoLos Altos Hills, CA 94022)
Abstract:
Embodiments described herein relate to a method for developing an exposed resist layer that includes an expos...