GENEVA, Aug. 12 -- APPLIED MATERIALS, INC. (3050 Bowers AvenueSanta Clara, California 95054) filed a patent application (PCT/US2025/010540) for "CRYOGENIC ETCHING OF SILICON-CONTAINING MATERIALS" on Jan 07, 2025. With publication no. WO/2025/165517, the details related to the patent application was published on Aug 07, 2025.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): LIAO, Lei (3050 Bowers AvenueSanta Clara, California 95054), FU, Qian (3050 Bowers AvenueSanta Clara, California 95054), AGARWAL, Sumit (3050 Bowers AvenueSanta Clara, California 95054), KWAK, Yeonju (3050 Bowers AvenueSanta Clar...