GENEVA, April 21 -- APPLIED MATERIALS, INC. (3050 Bowers AvenueSanta Clara, California 95054) filed a patent application (PCT/US2024/050513) for "COMPACT DYNAMIC LEVELING LIFT MECHANISM" on Oct 09, 2024. With publication no. WO/2025/080668, the details related to the patent application was published on Apr 17, 2025.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): NGUYEN, Tuan Anh (3050 Bowers AvenueSanta Clara, California 95054), KARUNAKARAN, Rohith Kuruvath (3050 Bowers AvenueSanta Clara, California 95054)
Abstract:
Exemplary semiconductor processing chambers may include a chamber body. The ch...