INTERNATIONAL PATENT: AJOU UNIVERSITY INDUSTRY-ACADEMIC COOPERATION FOUNDATION, 아주대학교산학협력단 FILES APPLICATION FOR "ETCHING GAS COMPOSITION COMPRISING HEXAFLUOROBENZENE AND PLASMA ETCHING METHOD USING SAME"

GENEVA, Oct. 28 -- AJOU UNIVERSITY INDUSTRY-ACADEMIC COOPERATION FOUNDATION ((Woncheon-dong) 206 World cup-ro, Yeongtong-guSuwon-siGyeonggi-do 16499), 아주대학교산학협력단 (경기도수원시영통구 월드컵로 206 (원천동)) filed a patent application (PCT/KR2025/002041) for "ETCHING GAS COMPOSITION COMPRISING HEXAFLUOROBENZENE AND PLASMA ETCHING METHOD USING SAME" on Feb 12, 2025. With publication no. WO/2025/220858, the details related to the patent application was published on Oct 23, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system...