GENEVA, April 30 -- AIXTRON SE (Dornkaulstr. 252134 Herzogenrath) filed a patent application (PCT/EP2024/079301) for "LOADING AND UNLOADING CYCLE FOR A CVD REACTOR SYSTEM" on Oct 17, 2024. With publication no. WO/2025/083109, the details related to the patent application was published on Apr 24, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): EICKELKAMP, Martin (Gluck-Auf-Str. 1152146 Wurselen), ALBRECHT, Christian (Terreicken 6841812 Erkelenz)

Abstract: The invention relates to a device and a method for simultaneously coating a plurality of substrates (1, 9) in at least one process chamb...