INTERNATIONAL PATENT: ADVANCED NANO FABRICATION TECHNOLOGIES (ANFT) PRIVATE LIMITED FILES APPLICATION FOR "AN APPARATUS OF SINGLE SUBSTRATE MULTI-ELECTRON BEAM LITHOGRAPHY ARRAY AND A METHOD OF FABRICATION THEREOF"

GENEVA, Jan. 12 -- ADVANCED NANO FABRICATION TECHNOLOGIES (ANFT) PRIVATE LIMITED (4F, Office No. 404, Block A, Solitaire Park, Nr. Divya Bhaskar Press, Makarba, S.G. HighwayAhmedabadGujarat 380051) filed a patent application (PCT/IB2025/056556) for "AN APPARATUS OF SINGLE SUBSTRATE MULTI-ELECTRON BEAM LITHOGRAPHY ARRAY AND A METHOD OF FABRICATION THEREOF" on Jun 27, 2025. With publication no. WO/2026/009111, the details related to the patent application was published on Jan 08, 2026.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): ROY, Angshuman (House No. 14, Sibram Sarani, Lake Town, SiliguriWes...