GENEVA, April 30 -- ADVANCED ENERGY INDUSTRIES, INC. (1595 Wynkoop StreetSuite 800Denver, Colorado 80202) filed a patent application (PCT/US2024/049421) for "ENHANCED CAPACITANCE SENSING SYSTEM FOR ELECTROSTATIC CHUCK DEVICES" on Oct 01, 2024. With publication no. WO/2025/085241, the details related to the patent application was published on Apr 24, 2025.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): ENZINNA, Donald J. (c/o Advanced Energy Industries, Inc.1595 Wynkoop Street, Suite 800Denver, Colorado 80202)
Abstract:
An electrostatic chuck system and method for determining workpiece bow are ...