Japan, Jan. 28 -- SUSS MICROTEC LITHOGRAPHY GMBH has got intellectual property rights for 'WET PROCESS MODULE AND OPERATION METHOD THEREOF.' Other related details are as follows:

Application Number: JP,2021-102430

Category (FI): H01L21/30,564@C,H01L21/30,569@C,H01L21/304,643@A,H01L21/304,648@G,H01L21/304,648@L,H01L21/68@N,H10P70/00,103@A,H10P70/00,108@G,H10P70/00,108@L,H10P72/70,H10P76/00,564@C,H10P76/00,569@C

Stage: Grant (IP right document published.)

Filing Date: June 21, 2021

Publication Date: Jan. 13, 2022

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication....