Japan, Oct. 30 -- XITEC INC has got intellectual property rights for 'WAFER VACUUM CARRIER.' Other related details are as follows:
Application Number: JP,2024-159971
Category (FI): H01L21/68@B,B65G49/07@H
Stage: Grant (IP right document published.)
Filing Date: Sept. 17, 2024
Publication Date: April 3
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
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