Japan, Nov. 11 -- TOKYO ELECTRON LTD has got intellectual property rights for 'WAFER SUPPORT BASE, PLASMA PROCESSING DEVICE AND EXCHANGE METHOD FOR RINGS.' Other related details are as follows:
Application Number: JP,2021-198257
Category (FI): H01L21/302,101@G,H01L21/68@N
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Dec. 7, 2021
Publication Date: June 19, 2023
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....