Japan, Oct. 30 -- DISCO ABRASIVE SYST LTD has got intellectual property rights for 'WAFER PROCESSING METHOD.' Other related details are as follows:
Application Number: JP,2021-147893
Category (FI): H01L21/68@N,H01L21/304,631,H01L21/304,622@Y,H01L21/304,601@Z,B23K26/53,H01L21/78@L,H01L21/78@M,H01L21/78@Q
Stage: Grant (IP right document published.)
Filing Date: Sept. 10, 2021
Publication Date: March 23, 2023
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....