Japan, Feb. 12 -- TOKYO ELECTRON LTD has got intellectual property rights for 'TRANSPORT SYSTEM, TRANSPORT DEVICE, AND TRANSPORT METHOD.' Other related details are as follows:
Application Number: JP,2021-211397
Category (FI): H01L21/68@A,H01L21/68@B,H01L21/68@F,H10P72/30@A
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Dec. 24, 2021
Publication Date: Sept. 7, 2022
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....