Japan, Nov. 17 -- ASML NETHERLANDS BV has got intellectual property rights for 'TIME-DEPENDENT DEFECT INSPECTION APPARATUS.' Other related details are as follows:
Application Number: JP,2024-117371
Category (FI): H01J37/22,502@H,H01J37/22,502@Z,H01L21/66@J
Stage: Grant (IP right granted following substantive examination.)
Filing Date: July 23, 2024
Publication Date: Nov. 26, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....