Japan, Nov. 7 -- TOKYO ELECTRON LTD has got intellectual property rights for 'SUBSTRATE TREATMENT DEVICE AND SUBSTRATE TREATMENT METHOD.' Other related details are as follows:
Application Number: JP,2021-040375
Category (FI): B05D3/00@D,B05D3/04@Z,H01L21/30,564@C,B05C11/08
Stage: Grant (IP right document published.)
Filing Date: March 12, 2021
Publication Date: Sept. 26, 2022
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....