Japan Intellectual Property Rights: SUBSTRATE TREATMENT APPARATUS AND PROGRAM

Japan, Jan. 28 -- EBARA CORP has got intellectual property rights for 'SUBSTRATE TREATMENT APPARATUS AND PROGRAM.' Other related details are as follows:

Application Number: JP,2022-125311

Category (FI): B24B37/005@Z,B24B37/04,B24B41/06@A,B24B51/00,H01L21/304,621@D,H01L21/304,622@R,H01L21/304,648@A,H01L21/304,648@H,H10P52/00@E,H10P52/00@T,H10P52/00@U,H10P52/40,H10P70/00,108@A,H10P70/00,108@H

Stage: Grant (IP right document published.)

Filing Date: Aug. 5, 2022

Publication Date: Feb. 16, 2024

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication....