Japan Intellectual Property Rights: SUBSTRATE PROCESSING SYSTEM

Japan, Oct. 30 -- TOKYO ELECTRON LTD has got intellectual property rights for 'SUBSTRATE PROCESSING SYSTEM.' Other related details are as follows:

Application Number: JP,2024-111458

Category (FI): H01L21/304,651@B,H01L21/304,642@B,H01L21/304,642@F,H01L21/304,648@A,H01L21/306@D,H01L21/68@A

Stage: Grant (IP right document published.)

Filing Date: July 11, 2024

Publication Date: Sept. 20, 2024

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication....