Japan Intellectual Property Rights: SUBSTRATE PROCESSING SYSTEM, SUBSTRATE PROCESSING METHOD AND RECORDING MEDIUM

Japan, Jan. 19 -- TOKYO ELECTRON LTD has got intellectual property rights for 'SUBSTRATE PROCESSING SYSTEM, SUBSTRATE PROCESSING METHOD AND RECORDING MEDIUM.' Other related details are as follows:

Application Number: JP,2022-024981

Category (FI): H01L21/304,642@A,H01L21/304,648@A,H01L21/304,648@H,H01L21/304,651@B,H01L21/304,651@Z,H01L21/68@A,H10P70/00,102@A,H10P70/00,108@A,H10P70/00,108@H,H10P70/00,201@B,H10P70/00,201@N,H10P70/00,201@Z,H10P72/30@A

Stage: Grant (IP right granted following substantive examination.)

Filing Date: Feb. 21, 2022

Publication Date: Aug. 31, 2023

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication....