Japan Intellectual Property Rights: SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING SYSTEM

Japan, Jan. 28 -- TOKYO ELECTRON LTD has got intellectual property rights for 'SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING SYSTEM.' Other related details are as follows:

Application Number: JP,2022-006660

Category (FI): H01L21/304,651@B,H10P70/00,201@B,H10P70/00,107@A,H10P70/00,103@C,H10P70/00,103@A,C23C28/00@A,C23F15/00,H01L21/304,643@C,H01L21/304,643@A,H01L21/304,647@A

Stage: Grant (IP right document published.)

Filing Date: Jan. 19, 2022

Publication Date: July 31, 2023

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication....