Japan, Oct. 29 -- TOKYO ELECTRON LTD has got intellectual property rights for 'SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING DEVICE.' Other related details are as follows:
Application Number: JP,2021-175600
Category (FI): H01L21/304,643@A,H01L21/306@R
Stage: Grant(IP right document published.)
Filing Date: Oct. 27, 2021
Publication Date: June 30, 2022
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....