Japan, Feb. 12 -- SHIBAURA MECHATRONICS CORP has got intellectual property rights for 'SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS.' Other related details are as follows:
Application Number: JP,2022-027063
Category (FI): H10P50/60@J,H01L21/306@A,H01L21/306@J,H10P50/60@A
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Feb. 24, 2022
Publication Date: Sept. 5, 2023
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....