Japan, Jan. 27 -- TOKYO ELECTRON LTD has got intellectual property rights for 'SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS.' Other related details are as follows:
Application Number: JP,2021-211865
Category (FI): H01L21/31@C,H01L21/316@X,H10P72/70,H01L21/302,101@B,H10P14/60,101@C,C23C16/44@G,C23C16/455,H10P14/692@X,H10P50/20,101@B,H01L21/68@N
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Dec. 27, 2021
Publication Date: July 7, 2023
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....