Japan, Jan. 27 -- SCREEN HOLDINGS CO LTD has got intellectual property rights for 'SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS.' Other related details are as follows:
Application Number: JP,2022-131506
Category (FI): H01L21/306@F,H10P50/66,H10P50/60@R,H01L21/306@R
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Aug. 22, 2022
Publication Date: March 6, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....