Japan, Nov. 17 -- SCREEN HOLDINGS CO LTD has got intellectual property rights for 'SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS.' Other related details are as follows:

Application Number: JP,2022-031796

Category (FI): H01L21/304,643@A,H01L21/304,648@G

Stage: Grant (IP right granted following substantive examination.)

Filing Date: March 2, 2022

Publication Date: Sept. 14, 2023

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

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