Japan, Nov. 17 -- SCREEN HOLDINGS CO LTD has got intellectual property rights for 'SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS.' Other related details are as follows:
Application Number: JP,2022-041219
Category (FI): H01L21/304,648@G,H01L21/304,643@A,H01L21/304,644@B
Stage: Grant (IP right granted following substantive examination.)
Filing Date: March 16, 2022
Publication Date: Sept. 29, 2023
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....