Japan, Nov. 7 -- TOKYO ELECTRON LTD has got intellectual property rights for 'SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS.' Other related details are as follows:

Application Number: JP,2021-149973

Category (FI): H01L21/304,643@A,H01L21/304,648@G,H01L21/304,651@H,H01L21/304,643@C,H01L21/304,645@Z,H01L21/30,569@E,H01L21/304,651@B

Stage: Grant (IP right document published.)

Filing Date: Sept. 15, 2021

Publication Date: April 21, 2022

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

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