Japan, Oct. 30 -- SCREEN HOLDINGS CO LTD has got intellectual property rights for 'SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS.' Other related details are as follows:
Application Number: JP,2021-142952
Category (FI): H01L21/304,648@J,H01L21/304,651
Stage: Grant (IP right document published.)
Filing Date: Sept. 2, 2021
Publication Date: March 14, 2023
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....