Japan Intellectual Property Rights: SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS, PROGRAM, AND COMPUTER STORAGE MEDIUM

Japan, Jan. 27 -- TOKYO ELECTRON LTD has got intellectual property rights for 'SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS, PROGRAM, AND COMPUTER STORAGE MEDIUM.' Other related details are as follows:

Application Number: JP,2024-176903

Category (FI): H10P52/00@R,H10P54/30,H10P54/20,201,H01L21/02@B,H01L21/304,622@J,H10P52/00@M

Stage: Grant (IP right granted following substantive examination.)

Filing Date: Oct. 9, 2024

Publication Date: Dec. 19, 2024

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication....