Japan Intellectual Property Rights: SUBSTRATE PROCESSING LIQUID, SUBSTRATE PROCESSING METHOD, AND SUBSTRATE PROCESSING DEVICE

Japan, Feb. 6 -- SCREEN HOLDINGS CO LTD has got intellectual property rights for 'SUBSTRATE PROCESSING LIQUID, SUBSTRATE PROCESSING METHOD, AND SUBSTRATE PROCESSING DEVICE.' Other related details are as follows:

Application Number: JP,2022-027521

Category (FI): H10P70/00,107@Z,H01L21/308@F,H01L21/304,647@Z,H10P50/66

Stage: Grant (IP right granted following substantive examination.)

Filing Date: Feb. 25, 2022

Publication Date: Sept. 6, 2023

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication....