Japan, Feb. 6 -- TOKYO ELECTRON LTD has got intellectual property rights for 'SUBSTRATE PROCESSING DEVICE.' Other related details are as follows:
Application Number: JP,2023-020293
Category (FI): H10P72/30@A,H01L21/68@F,H01L21/68@A,H10P72/50@F
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Feb. 13, 2023
Publication Date: Aug. 23, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....