Japan, Jan. 28 -- DISCO ABRASIVE SYST LTD has got intellectual property rights for 'SUBSTRATE PROCESSING DEVICE.' Other related details are as follows:
Application Number: JP,2021-141364
Category (FI): B24B41/06@L,B24B49/10,B24B41/06@A,H01L21/304,631,H10P52/00@C,H01L21/68@A,B23Q3/02@A,H10P72/30@A
Stage: Grant (IP right document published.)
Filing Date: Aug. 31, 2021
Publication Date: March 13, 2023
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....