Japan, Jan. 28 -- TOKYO ELECTRON LTD has got intellectual property rights for 'SUBSTRATE PROCESSING DEVICE AND TEMPERATURE ADJUSTMENT METHOD.' Other related details are as follows:
Application Number: JP,2022-109288
Category (FI): H01L21/31@E,C23C16/52,H10P14/60,101@E
Stage: Grant (IP right document published.)
Filing Date: July 6, 2022
Publication Date: Jan. 19, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....