Japan Intellectual Property Rights: SUBSTRATE PROCESSING DEVICE AND SUBSTRATE PROCESSING METHOD

Japan, Jan. 28 -- SCREEN HOLDINGS CO LTD has got intellectual property rights for 'SUBSTRATE PROCESSING DEVICE AND SUBSTRATE PROCESSING METHOD.' Other related details are as follows:

Application Number: JP,2021-149463

Category (FI): H01L21/304,643@A,H01L21/306@J,H01L21/306@B,H10P50/60@A,H01L21/304,648@G,H01L21/304,647,H10P70/00,108@G,H10P70/00,107,H10P70/00,103@A,H10P50/60@J

Stage: Grant (IP right document published.)

Filing Date: Sept. 14, 2021

Publication Date: March 27, 2023

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication....