Japan, Oct. 30 -- TOKYO ELECTRON LTD has got intellectual property rights for 'SUBSTRATE PROCESSING DEVICE AND SUBSTRATE PROCESSING METHOD.' Other related details are as follows:

Application Number: JP,2024-166231

Category (FI): H01L21/304,648@G,H01L21/304,648@K,H01L21/304,651@Z

Stage: Grant (IP right document published.)

Filing Date: Sept. 25, 2024

Publication Date: Dec. 24, 2024

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication....