Japan, Nov. 11 -- DISCO ABRASIVE SYST LTD has got intellectual property rights for 'SUBSTRATE PROCESSING DEVICE, AND SUBSTRATE PROCESSING METHOD.' Other related details are as follows:
Application Number: JP,2022-017037
Category (FI): H01L21/304,621@B,B24B41/06@L,B23Q3/08@A,H01L21/68@P,H01L21/304,631,H01L21/78@Q,B24B49/12
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Feb. 7, 2022
Publication Date: Aug. 18, 2023
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....