Japan Intellectual Property Rights: SUBSTRATE PROCESSING APPARATUS

Japan, Jan. 28 -- EBARA CORP has got intellectual property rights for 'SUBSTRATE PROCESSING APPARATUS.' Other related details are as follows:

Application Number: JP,2024-167617

Category (FI): B24B37/10,B24B41/06@A,H01L21/304,622@L,H01L21/304,622@N,H01L21/304,622@Q,H01L21/304,643,H01L21/304,644@C,H01L21/304,648@J,H01L21/68@A,H10P52/00@P,H10P52/00@R,H10P52/00@T,H10P52/40,H10P70/00,103,H10P70/00,104@C,H10P70/00,108@J,H10P72/30@A

Stage: Grant (IP right document published.)

Filing Date: Sept. 26, 2024

Publication Date: Dec. 17, 2024

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication....