Japan, Feb. 12 -- TOKYO ELECTRON LTD has got intellectual property rights for 'SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD.' Other related details are as follows:

Application Number: JP,2021-196119

Category (FI): G01N9/00@A,H01L21/304,648@G,H01L21/304,651@Z,H01L21/304,648@K,H10P70/00,108@G,H10P70/00,108@K,H10P70/00,201@N,H10P70/00,201@Z

Stage: Grant (IP right granted following substantive examination.)

Filing Date: Dec. 2, 2021

Publication Date: Sept. 30, 2022

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication....