Japan, Jan. 28 -- SCREEN HOLDINGS CO LTD has got intellectual property rights for 'SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD.' Other related details are as follows:

Application Number: JP,2022-048897

Category (FI): H01L21/304,643@A,H10P70/00,103@A

Stage: Grant (IP right document published.)

Filing Date: March 24, 2022

Publication Date: Oct. 5, 2023

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication....