Japan, Jan. 20 -- SCREEN HOLDINGS CO LTD has got intellectual property rights for 'SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD.' Other related details are as follows:

Application Number: JP,2024-197417

Category (FI): H10P50/68@B,H01L21/306@J,H01L21/306@E,H10P50/60@J

Stage: Grant (IP right document published.)

Filing Date: Nov. 12, 2024

Publication Date: Jan. 24, 2025

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication....