Japan, Nov. 11 -- SHIBAURA MECHATRONICS CORP has got intellectual property rights for 'SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD.' Other related details are as follows:
Application Number: JP,2020-171115
Category (FI): H01L21/306@R
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Oct. 9, 2020
Publication Date: April 11, 2022
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....