Japan, Jan. 20 -- SCREEN HOLDINGS CO LTD has got intellectual property rights for 'SUBSTRATE PROCESSING APPARATUS AND MONITORING METHOD.' Other related details are as follows:

Application Number: JP,2022-018670

Category (FI): H10P70/00,108@G,H10P76/00,572@B,H01L21/304,648@G,H10P50/60@R,H01L21/30,572@B,H01L21/306@R

Stage: Grant (IP right document published.)

Filing Date: Feb. 9, 2022

Publication Date: Aug. 22, 2023

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication....