Japan, Nov. 7 -- KOKUSAI ELECTRIC CORP has got intellectual property rights for 'SUBSTRATE PROCESSING APPARATUS, METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE, AND PROGRAM.' Other related details are as follows:

Application Number: JP,2022-123485

Category (FI): H01L21/68@A

Stage: Grant (IP right document published.)

Filing Date: Aug. 2, 2022

Publication Date: Feb. 15, 2024

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication....