Japan, Nov. 7 -- KOKUSAI ELECTRIC CORP has got intellectual property rights for 'SUBSTRATE PROCESSING APPARATUS, MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE, AND PROGRAM.' Other related details are as follows:
Application Number: JP,2022-149293
Category (FI): G05B19/418@Z,H01L21/02@Z
Stage: Grant (IP right document published.)
Filing Date: Sept. 20, 2022
Publication Date: April 2, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....