Japan, Nov. 7 -- KOKUSAI ELECTRIC CORP has got intellectual property rights for 'SUBSTRATE PROCESSING APPARATUS, MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE, AND PROGRAM.' Other related details are as follows:

Application Number: JP,2022-149293

Category (FI): G05B19/418@Z,H01L21/02@Z

Stage: Grant (IP right document published.)

Filing Date: Sept. 20, 2022

Publication Date: April 2, 2024

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

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