Japan, Nov. 11 -- ASM IP HOLDING BV has got intellectual property rights for 'SUBSTRATE PROCESSING APPARATUS, BEVEL MASK AND SUBSTRATE PROCESSING METHOD.' Other related details are as follows:
Application Number: JP,2020-198766
Category (FI): H01L21/31@C,C23C16/458,C23C16/50
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Nov. 30, 2020
Publication Date: June 17, 2021
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....