Japan Intellectual Property Rights: SUBSTRATE POLISHING METHOD, SUBSTRATE POLISHING DEVICE, AND COMPUTER-READABLE RECORDING MEDIUM WITH PROGRAM RECORDED

Japan, Jan. 30 -- EBARA CORP has got intellectual property rights for 'SUBSTRATE POLISHING METHOD, SUBSTRATE POLISHING DEVICE, AND COMPUTER-READABLE RECORDING MEDIUM WITH PROGRAM RECORDED.' Other related details are as follows:

Application Number: JP,2021-202192

Category (FI): B23Q15/00,301@H,H10P52/00@Y,B24B9/00,601@G,H01L21/304,621@E,B24B21/00@A

Stage: Grant (IP right granted following substantive examination.)

Filing Date: Dec. 14, 2021

Publication Date: June 26, 2023

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication....