Japan, Jan. 28 -- TOKYO ELECTRON LTD has got intellectual property rights for 'SUBSTRATE HEATING APPARATUS AND SUBSTRATE PROCESSING APPARATUS.' Other related details are as follows:
Application Number: JP,2022-034478
Category (FI): H10P14/60,101@B,H01L21/31@B,H01L21/68@N,C23C16/46,H10P72/70
Stage: Grant (IP right document published.)
Filing Date: March 7, 2022
Publication Date: Sept. 20, 2023
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....