Japan, Jan. 28 -- SHINKO ELECTRIC IND CO LTD has got intellectual property rights for 'SUBSTRATE FIXING APPARATUS AND MANUFACTURING METHOD OF SUBSTRATE FIXING APPARATUS.' Other related details are as follows:
Application Number: JP,2022-133942
Category (FI): C23C16/458,H01L21/205,H01L21/302,101@G,H01L21/68@R,H10P14/24,H10P50/20,101@G,H10P72/72
Stage: Grant (IP right document published.)
Filing Date: Aug. 25, 2022
Publication Date: March 7, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....