Japan Intellectual Property Rights: SUBSTRATE DETECTION DEVICE, SUBSTRATE PROCESSING DEVICE, AND SUBSTRATE DETECTION METHOD

Japan, Feb. 12 -- SCREEN HOLDINGS CO LTD has got intellectual property rights for 'SUBSTRATE DETECTION DEVICE, SUBSTRATE PROCESSING DEVICE, AND SUBSTRATE DETECTION METHOD.' Other related details are as follows:

Application Number: JP,2022-025736

Category (FI): H01L21/304,648@A,H10P70/00,102@A,H10P70/00,108@A,H01L21/304,648@G,H10P70/00,108@G,H01L21/68@F,H10P72/50@F,H01L21/304,642@A

Stage: Grant (IP right granted following substantive examination.)

Filing Date: Feb. 22, 2022

Publication Date: Sept. 1, 2023

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication....