Japan Intellectual Property Rights: SUBSTRATE CONVEYING DEVICE, SUBSTRATE CONVEYING METHOD, AND SUBSTRATE PROCESSING SYSTEM

Japan, Jan. 28 -- TOKYO ELECTRON LTD has got intellectual property rights for 'SUBSTRATE CONVEYING DEVICE, SUBSTRATE CONVEYING METHOD, AND SUBSTRATE PROCESSING SYSTEM.' Other related details are as follows:

Application Number: JP,2021-002579

Category (FI): B65G54/02,H01L21/68@A,H10P72/30@A

Stage: Grant (IP right document published.)

Filing Date: Jan. 12, 2021

Publication Date: July 25, 2022

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication....