Japan, Feb. 6 -- EBARA CORP has got intellectual property rights for 'SUBSTRATE CLEANING METHOD AND SUBSTRATE CLEANING APPARATUS.' Other related details are as follows:
Application Number: JP,2022-007863
Category (FI): H01L21/304,644@C,H10P70/00,104@C
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Jan. 21, 2022
Publication Date: Aug. 2, 2023
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....